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采用室温磁控溅射技术成功地在钢(Cr12MoV)基材表面制备出TiB2/SiC双层薄膜及掺碳TiB2(TiB2-C)/SiC双层薄膜,SiC薄膜为中间层。研究了掺碳对TiB2薄膜组织结构和摩擦磨损性能的影响。结果表明:SiC薄膜与基材和TiB2,TiB2-C薄膜间都具有明显且呈梯度的元素扩散;掺入的C以sp3C-C和sp2C-C形式存在,即以类金刚石形式存在;与钢球(直径为4 mm)对摩、干摩擦条件下,TiB2薄膜和TiB2-C薄膜的磨损速率在105mm3/(m.N)级,掺C明显降低了薄膜的摩擦系数(从0.82降低到0.45,5 min)和对对摩件(钢)的元素转移。分析表明,摩擦磨损性能的提高主要是TiB2-C薄膜中的C起到了固体润滑作用所致。
TiB2 / SiC bilayer films and TiB2-C / SiC bilayer films were successfully prepared on the surface of Cr12MoV steel substrate by magnetron sputtering at room temperature. The SiC film was an intermediate layer. The effect of carbon doping on the microstructure and friction and wear properties of TiB2 films was investigated. The results show that there is a clear and gradient element diffusion between the SiC film and the substrate, TiB2 and TiB2-C films. The doped C exists in the form of sp3C-C and sp2C-C, The wear rate of TiB2 film and TiB2-C film is about 105mm3 / (mN) under the conditions of friction and dry friction under the condition of friction and dry friction (ball diameter is 4mm). The friction coefficient of the film decreases from 0.82 to 0.45,5 min) and on the friction pieces (steel) element transfer. The analysis shows that the improvement of friction and wear properties is mainly due to the solid lubricating effect of C in TiB2-C film.