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电子探针、扫描电子显微镜的应用愈来愈广,无论是冶金、材料学等各个领域都迫切需要对超轻元素(B、C、N、O、F)进行分析。由于这些元素的特征X射线波长较长,因此影响分析测试的因素较多,例如X射线的吸收严重,样品污染影响分析精度,以及X射线探测器的输出脉冲幅度小。能量分辨率差等,为了进行超轻元素分析就必须采取一系列的措施,例如采用超薄膜探测器窗口,采用负气压流气正比计数管,以提高输出脉冲幅度及能量分辨率等。本文将叙述有关超轻元素分析的关键技术,包括超薄膜探测器窗口的制备,及流气正比计数管负气压工作条件的获得等。共分以下三节。
The application of electron probe and scanning electron microscope is getting wider and wider. There is an urgent need to analyze the super light elements (B, C, N, O, F) in various fields such as metallurgy and materials science. Due to the longer wavelength of characteristic X-rays of these elements, there are a number of factors that influence the analytical test, such as severe X-ray absorption, the impact of sample contamination analysis, and the small output pulse amplitude of the X-ray detector. Poor energy resolution, in order to carry out super-light elemental analysis, a series of measures must be taken, such as the use of ultra-thin film detector window, negative pressure proportional to the flow of gas counting tube to increase the output pulse amplitude and energy resolution. This article will describe the key technologies involved in the analysis of ultra-light elements, including the preparation of ultra-thin film detector windows and the acquisition of negative pressure operating conditions for gas proportional counter tubes. Divided into the following three sections.