一、引言在试验或监控用于塑性焊接、金属塑性切削加工和粉末成形一类的大功率超声装置时,常常要求以约0.2μm的准确度测量儿微米的振幅。目前已研究成功多种光学测量振幅的方法,但是,它们大都不能实时工作,而且(或者)实际使用起来相当复杂。 I. INTRODUCTION In testing or monitoring high-power ultrasound devices for plastic welding, metal-plastic machining, and powder forming, it is often required to measure the amplitude of a few microns with an accuracy of about 0.2 μm. A number of successful methods of optically measuring amplitudes have been studied so far, but most of them do not work in real time and (or) are actually quite complex to use.