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提出一种基于有限Radon变换(FRAT)的MEMS结构特征方向提取方法.首先,将MEMS表面数据转换为二维数据矩阵,并将矩阵延展成素数大小的方阵;然后,对延展后的数据沿着特定的方向进行投影变换和点积分运算,得到结果矩阵;最后,将结果矩阵用灰度图显示,根据图像中的0灰度值的像素点所在的行列得到原始表面中的主要方向.通过对MEMS器件沟槽结构的模拟分析以及对MEMS器件沟槽和柱状阵列结构的实验分析,验证了该方法的有效性.实验结果表明该方法方向提取误差小于1%.
This paper presents a method of extracting the feature orientation of MEMS structures based on the finite Radon transform (FRAT). Firstly, the MEMS surface data is transformed into a two-dimensional data matrix and the matrix is extended to a matrix of prime numbers. Then, Finally, the result matrix is displayed in grayscale, and the main direction of the original surface is obtained according to the row and column in which the pixels of the grayscale value in the image are located. Through the projection transformation and the point integral calculation in a specific direction, The simulation analysis of the trench structure of MEMS device and the experimental analysis of the structure of the trench and the columnar array of the MEMS device verify the effectiveness of the method. The experimental results show that the error of the method is less than 1%.