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一、引言 X光电子谱(XPS)已在固体表面成分分析及表面电子能态的研究中获得了广泛的应用。但是由于常用的X光源的非单色性以及电子能谱仪本身的仪器传递特性,常使X光电子谱的谱形加宽,分辨率降低。为此,常采用退卷积的方法对XPS实验数据进行数字处理,以提高其分辨率。在退卷积时,首先必须知道谱线的加宽函数。我们采用了两种方法对加宽函数进行了测量,并获得一致的结果。
I. INTRODUCTION X-ray photoelectron spectroscopy (XPS) has been widely used in the analysis of solid surface composition and surface electron energy states. However, due to the non-monochromatic nature of the commonly used X-ray source and the instrument transfer characteristics of the electron spectrometer itself, the spectral shape of the X-ray photoelectron spectrum is often broadened and the resolution is reduced. To this end, the method of deconvolution is often used to digitally process XPS experimental data to improve its resolution. When deconvolution, we must first know the spectral broadening function. We used two methods to measure the broadening function and obtain consistent results.