本文简述了隧道二极管的工作原理,分析了用作高速脉冲讯号源用的隧道二极管的若干基本要求,探讨了制备成所需指标的可能工艺,指出了用平面工艺可以完成性能甚为优越的超高速开关锗隧道二极管,给出了基本工艺条件及试制的初步结果,表明了用平面工艺可制备成当前最快速脉冲讯号源用的开关隧道管。 This paper briefly describes the working principle of tunnel diode and analyzes some basic requirements for tunnel diode used as high-speed pulse signal source. The possible process for preparing the required target is discussed. It is pointed out that the planar process can achieve excellent performance Ultra-high-speed switch germanium tunnel diode, given the basic process conditions and trial preliminary results show that the use of planar technology can be prepared into the current fastest pulse signal source switch tunneling tube.