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采用X射线光电子能谱(XPS)研究了带有两种纳米氧化层(NOL)Ta/Ni80Fe20/Ir19Mn81/Co90Fe10∥NOL1∥Co90Fe10/Cu/Co90Fe10∥NOL2/Ta的镜面反射自旋阀薄膜的化学结构.研究结果表明:CoFe/NOL1和NOL2/Ta界面处发生了热力学有利的化学反应.CoFe磁性敏感层仍保持金属特性,部分氧化的CoFe和Ta发生界面反应,使得Ta覆盖层被氧化成Ta2O5,形成NOL2.由于仍存在部分金属CoFe,NOL1为不连续的氧化层,使得与IrMn层仍存在直接的交换耦合作用.在退火过程中,IrMn层中的Mn原子扩散到NOL1中;然而,由于NOL1和扩散的Mn原子发生界面反应,生成Mn的氧化物,从而阻止Mn原子的进一步扩散,使其偏聚在NOL1中.
The chemical structures of the specular-reflection spin-valve films with two nano-oxide layers (NOL) Ta / Ni80Fe20 / Ir19Mn81 / Co90Fe10 // NO1 // Co90Fe10 / Cu / Co90Fe10 // NO2 / Ta have been studied by X-ray photoelectron spectroscopy The results show that there is a thermodynamic favorable chemical reaction at the CoFe / NOL1 / NOL2 / Ta interface.The metallic properties of the CoFe magnetically sensitive layer remain unchanged, and the partially oxidized CoFe and Ta interfacially react to make the Ta capping layer be oxidized to Ta2O5, Forming NOL2. Because there are still some metal CoFe, NOL1 is a discontinuous oxide layer, so there is still a direct exchange coupling with the IrMn layer .In the annealing process, Mn atoms in the IrMn layer diffuse into NOL1; However, due to NOL1 An interfacial reaction occurs with the diffused Mn atom to form an oxide of Mn, thereby preventing further diffusion of the Mn atom and segregating it in NOL1.