激光驱动微纳器件为微机械领域中驱动微齿轮提供了一种新型的驱动方式。偏振光束的自旋角动量向晶体微粒传递可使其旋转,基于晶体波动光学理论分析了影响其旋转频率的各种因素(如微粒的厚度和半径;晶体光轴与晶面的夹角;光束在晶面的反射率和透射率、光束振幅比和位相差、激光功率),并推导出晶体微粒的旋转角速度的解析公式。为验证理论结果,在光镊平台上实现了碳酸钙晶体微粒的定位操控和旋转。所得实验值整体比理论值小是由于实际作用在粒子上的的激光有效功率比实验测量值要偏小;结合理论模拟与实验结果对比分析得知:碳酸钙晶体微粒的旋转角速度与激光功率成正比、与晶体微粒半径的三次方成反比、与微粒厚度成周期性变化规律。依此为提高微机械转子的旋转频率进行优化设计:选择Ca CO3晶体微粒作为微机械转子较为合适,Ca CO3晶体微粒的半径和厚度均取为1~3μm。 Laser-driven micro-nano devices provide a new type of drive for driving micro-gears in the field of micromachining. The angular momentum of the polarized beam is transferred to the crystal particles to make it rotate. Based on the optical theory of crystal oscillation, various factors that influence the rotation frequency (such as the thickness and radius of the particles, the included angle between the crystal axis and the crystal plane, The reflectivity and transmittance at the crystal plane, the difference between the beam amplitude ratio and the phase, and the laser power), and the analytical formula of the rotational angular velocity of the crystal particles is deduced. In order to verify the theoretical results, the positioning and rotation of the calcium carbonate crystal particles are achieved on the optical tweezers platform. The experimental value obtained is smaller than the theoretical value because the effective laser power actually acting on the particles is smaller than the experimental measurement value. By comparing the theoretical simulation with the experimental results, it is known that the angular velocity of the calcium carbonate crystal particles and the laser power Is proportional to, and inversely proportional to the cube of the radius of the crystal particles, and the thickness of the particles into a periodic change. In order to improve the rotational frequency of the micromachined rotor, the optimal design is as follows: CaCO3 crystal particles are suitable as the micromachined rotor, and the radius and thickness of the CaCO3 crystal particles are both 1 to 3 μm.