硅作为一种重要的半导体材料,在微电子领域发挥着极其重要的作用。有机单分子层修饰硅表面是近年来硅表面化学领域的一个研究热点,引起了研究者的广泛重视。以共价键嫁接在硅表面的有机单分子层能形成稳定、高质量的杂化连接,将赋予传统硅材料更多新功能,具有许多其他表面难以比拟的优点。本文针对有机分子修饰硅表面的方法、单层膜的表征和应用,对近年来的最新研究进展进行了综述,并对该方向今后的发展进行了展望。 Silicon, as an important semiconductor material, plays an extremely important role in the field of microelectronics. Organic monolayer modification of the silicon surface is a hot topic in the field of silicon surface chemistry in recent years, causing researchers to pay wide attention. The covalent bonding of organic monolayers on the surface of silicon to form stable, high quality hybrid connections will give new capabilities to traditional silicon materials with many other advantages that are difficult to compare with other surfaces. In this paper, we review the latest research progress of organic molecules in the modification of silicon surface, characterization and application of monolayers, and prospect the future development of this aspect.