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介绍了重掺锑硅单晶生长和应用中的主要特点,并对单晶生长过程中出现的关键问题,如锑的挥发、氧含量减少的原因进行了探讨并提出了一些解决办法
The main characteristics of the growth and application of heavy antimony-doped silicon single crystal are introduced. The key problems in single crystal growth, such as the volatilization of antimony and the reduction of oxygen content, are discussed and some solutions are proposed