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在纳秒激光脉冲辐照下,随着CCD探测器损伤程度的加深,成像系统输出画面中先后出现点损伤、白线损伤以及完全失效等现象,且损伤阈值呈现出概率分布特性。实验激光波长为1064nm,首先采用n-on-1辐照模式,研究CCD探测器在不同损伤程度下的损伤现象,从器件工作原理的角度分析各种现象出现的机理。利用光学显微镜观察样品的损伤形貌,发现探测器的损伤部位从内部材料开始,逐渐发展到位于表面的微透镜结构。接下来,采用1-on-1辐照模式测量了点损伤和完全失效阶段的激光能量密度阈值,并以损伤概率的形式进行描述,得到实验样品的完全失效阈值在100 mJ/cm2左右。
Under the nanosecond laser pulse irradiation, with the deepening of the damage of the CCD detector, point damage, white line damage and complete failure occur successively in the output screen of the imaging system, and the damage threshold shows a probability distribution characteristic. Experimental laser wavelength of 1064nm, the first n-on-1 irradiation mode to study the CCD detector damage at different levels of damage from the working principle of the device to analyze the mechanism of various phenomena. Using the optical microscope to observe the damage morphology of the sample, it is found that the damaged part of the detector begins with the internal material and gradually develops to the microlens structure located on the surface. Next, the laser energy density thresholds of the point damage and complete failure phases were measured by the 1-on-1 irradiation mode and described by the damage probability. The complete failure threshold of the experimental samples was about 100 mJ / cm2.