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研究了半导体激光自混合干涉测振仪的调制与解调技术。设计了基于电流调制和DSP解调的半导体激光自混合干涉测量系统,实现对振动物体的非接触式测量。分析了激光自混合干涉测振仪的理论模型,并用Matlab进行了仿真和误差分析。研究了系统的调制解调技术及基于DSP的数据采集与处理系统。该系统体积小、成本低、易于准直。提出的测振仪能够测量振动频率在5kHz内的物体振动频率、振幅及振动波形,振动幅度测量精度可达0.325μm。
The modulation and demodulation technology of semiconductor laser self-mixing interferometer is researched. A semiconductor laser self-mixing interference measurement system based on current modulation and DSP demodulation is designed to realize the non-contact measurement of vibrating objects. The theoretical model of laser self-mixing interferometer is analyzed, and the simulation and error analysis are carried out by Matlab. The system modulation and demodulation technology and DSP-based data acquisition and processing system are studied. The system is small, low cost, easy to align. The proposed vibrometer can measure the vibration frequency, amplitude and vibration waveform of the object with the vibration frequency within 5 kHz. The vibration amplitude measurement accuracy can reach 0.325 μm.