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提出了一种新颖的钯(Pd)/金(Au)复合膜表面等离子共振氢敏结构,与单一Pd膜氢敏传感器相比,具有可靠性好、灵敏度高和响应度大等特点。利用表面等离子共振理论建立了Au/Pd复合膜氢敏传感器的数学模型,并对Au/Pd复合膜氢敏传感器的灵敏度进行了数值模拟。数值模拟结果表明:基于Au(2nm)/Pd(20nm)复合膜氢敏传感器所获得的最佳灵敏度比单一Pd(20nm)膜氢敏传感器提高了49 4%。
A novel palladium / gold (Au) composite membrane surface plasmon resonance hydrogen sensing structure is proposed. Compared with a single Pd membrane hydrogen sensor, it has the characteristics of high reliability, high sensitivity and high responsivity. The surface plasmon resonance theory was used to establish the mathematical model of Au / Pd composite hydrogen sensor. The sensitivity of the Au / Pd composite hydrogen sensor was numerically simulated. The numerical simulation results show that the optimal sensitivity obtained by Au (2nm) / Pd (20nm) composite membrane hydrogen sensor is 49 4% higher than that of single Pd (20nm) membrane hydrogen sensor.