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在脉冲离子束流密度为15-120A/cm2、脉宽为50-150ns、加速电压为150-260kV范围内,在1×104cm-2的低注量水平上,研究了高功率Cn++H+混合离子束注入45号钢样品的强脉冲能量效应.摩擦磨损和微观硬度测量以及SEM和X射线衍射分析表明,上述低注量强脉冲离子束注入可以改变材料表面的微观结构和力学特性,而且强烈依赖于单个脉冲离子束的功率密度和能量密度,在相同离子注量条件下,普通C++H+离子注入对45号钢样品表面微硬度和摩擦系数未见明显影响.直接证明了强脉冲能量效应在离子注入中是相对独立于注入元素掺杂效应的又一可利用的重要效应.基于一维导热模型,讨论了强脉冲能量效应以及脉冲离子束功率密度对离子束材料表面改性的作用。
The high power Cn ++ H + mixed ion beam was studied at a low fluence of 1 × 104cm-2 at a pulse ion beam current density of 15-120A / cm2, pulse width of 50-150ns and acceleration voltage of 150-260kV. Strong pulse energy effect injected into 45 steel sample. Frictional wear and microhardness measurements as well as SEM and X-ray diffraction analysis show that the above low-impulse intense pulsed ion beam implantation can change the microstructure and mechanical properties of the material surface, and strongly depend on the power density and energy density of a single pulsed ion beam, Under the same ion fluence, no significant effect on the microhardness and friction coefficient of 45 steel samples was observed with ordinary C + + H + ion implantation. It is directly proved that the strong pulse energy effect is another available important effect in ion implantation which is relatively independent of the doping effect of the implanted elements. Based on the one-dimensional thermal model, the effect of intense pulse energy and the power density of pulsed ion beam on the surface modification of ion beam materials are discussed.