本文介绍我们建立的一套可在UHV条件下使用的样品加热装置,包括可转移式加热样品托,适用于还原气氛以及UHV条件下的电阻加热器、光加热器以及与这两种加热器配套的快速程序升温控制仪。应用电加热器,样品温度可达1000℃以上;应用光加热器,样品表面温度可达650℃,程控升温速度可高达100℃/s,升温线性良好。这套装置所用的材料、元器件和仪器设备都是国内容易得到的,一般的UHV实验室都不难自行建立。 This article describes a set of sample heaters that can be used under UHV conditions, including a transferable heated sample holder, a reducing atmosphere, resistance heaters under UHV, light heaters, and a combination of these two heaters Fast program temperature controller. Application of electric heater, the sample temperature up to 1000 ℃ above; the application of light heater, the sample surface temperature up to 650 ℃, programmed heating rate up to 100 ℃ / s, heating a good linearity. The materials, components and equipment used in this device are easily accessible in China. The UHV laboratory is not difficult to set up by itself.