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介绍了一种可用于差动电容敏感的加速度传感器的信号检测电路,给出了在电路中所用的电子元器件,同时进行分析,得到电路的输出电压和传感器信号电容变化量之间的关系。实验结果表明,该电路的线性高,测量差分电容变化的灵敏度好,是一种具有实用价值的微差分电容测量接口电路。
This paper introduces a signal detection circuit which can be used in differential capacitive sensitive accelerometer. The electronic components used in the circuit are given, and the relationship between the output voltage of the circuit and the change of signal capacitance of the sensor is obtained. The experimental results show that the circuit has high linearity and good sensitivity in measuring the change of differential capacitance, which is a practical micro differential capacitance measurement interface circuit.