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本文采用独立组元法对In-Ga合金源汽相外延生长In_xGa_(1-x)As体系的平衡状态作了热力学计算和分析,所得结果对认识该体系外延生长的规律性及改进工艺条件有一定参考价值.
In this paper, the thermodynamic calculation and analysis of the equilibrium state of In_xGa_ (1-x) As system for vapor phase epitaxial growth of In-Ga alloys by using the independent component method are carried out. The obtained results are helpful to understand the regularity of the epitaxial growth and the improvement of the process conditions Certain reference value.