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本文介绍的宽温度范围低频噪声谱测量及谱分析系统，可以准确测量７７～３００Ｋ范围内半导体器件的低频噪声谱（１Ｈｚ～１００ＫＨｚ）。其测量精度优于４％。温控精度达±０．２Ｋ。
This article describes the wide temperature range of low-frequency noise spectrum measurement and spectral analysis system that can accurately measure the low-frequency noise spectrum (1Hz ~ 100KHz) semiconductor devices in the range of 77 ~ 300K. Its measurement accuracy is better than 4%. Temperature control accuracy of ± 0.2K.