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介绍了采用铁(Ti)扩散技术制作的集成光学多功能器件,主要用于光纤陀螺系统,实现分束、调制和偏振功能。分析了器件的工作原理、特性和制作工艺特点,介绍了器件的结构、制作方法、工艺参数以及器件的性能指标和测试方法。器件调制半波电压为4.2V,插入损耗为6.15dB,分束比优于±1%。
An integrated optical multifunctional device fabricated using iron (Ti) diffusion technology is introduced. It is mainly used in fiber optic gyroscope systems for beam splitting, modulation and polarization functions. The working principle, characteristics and manufacturing process characteristics of the device are analyzed. The structure, fabrication method, process parameters and the performance index and test method of the device are introduced. The modulation half-wave voltage of the device is 4.2V, the insertion loss is 6.15dB, the splitting ratio is better than ± 1%.