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光阻法智能微粒检测仪是检测不溶性微粒的精密仪器。为了保证测试的可靠性 ,需对影响测试精度的各个环节进行实时监控。本文就仪器 3个主要监控环节的设计进行了讨论
Photoresist smart particle detector is to detect insoluble particles of precision instruments. In order to ensure the reliability of the test, it is necessary to monitor the various links that affect the test accuracy in real time. This article discusses the design of the three main monitoring aspects of the instrument