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介绍了一种新型非制冷高速高灵敏度硅基电容式红外探测器的工作原理,描述了探测器的设计思想及制作工艺。该探测器采用密封于微气腔的特殊气体吸收红外辐射以改变探测器微电容的原理来进行红外探测,制作工艺采用微机械加工技术。对样品的测试表明这种红外探测器能探测红外信号。
This paper introduces the working principle of a new type of uncooled high speed and high sensitivity silicon based capacitive infrared detector and describes the design idea and manufacturing process of the detector. The detector uses a special gas sealed in the micro-cavity to absorb infrared radiation to change the principle of the detector micro-capacitance for infrared detection, the production process using micro-machining technology. Tests on samples show that the infrared detector can detect infrared signals.