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采用微波等离子体化学气相沉积(MW-PCVD)和直流热阴极辉光放电等离子体化学气相沉积(DC-PCVD)两种方法相结合,制备出一种吸收辐射的复合金刚石膜,它对宽光谱范围的光辐射具有99%—99.2%的吸收率,同时具有较低的反射率和透过率.随着黑色吸收辐射金刚石层厚度的增加,复合金刚石膜的热导率将小幅度降低,但黑色金刚石膜层厚度小于15μm时,复合金刚石膜的热导率都在16W.cm-1.K-1以上,这满足吸收辐射复合金刚石膜的高导热需求.用热阴极DC-PCVD方法制备的黑色吸收辐射金刚石膜层在1500—1600cm-1范围和1350cm-1处出现了对应于非金刚石碳相的宽带拉曼峰.随着甲烷浓度的增加,金刚石膜中会出现更多的非金刚石碳相成分,即石墨等非金刚石碳相在金刚石膜中富集,复合金刚石膜的透光性也越来越差.黑色吸收辐射金刚石层直接沉积在高纯金刚石片上,具有较高热导率和吸收率,并且该复合膜背面具有绝缘性.
A combination of microwave plasma chemical vapor deposition (MW-PCVD) and direct current hot cathode glow discharge plasma chemical vapor deposition (DC-PCVD) was used to fabricate a composite diamond film that absorbs radiation. Its broad spectrum The range of optical radiation has an absorptivity of 99% -99.2%, with a lower reflectivity and transmittance.With the increase of the thickness of the black absorbing radiation diamond layer, the thermal conductivity of the composite diamond film will decrease slightly, When the thickness of the black diamond film is less than 15μm, the thermal conductivity of the composite diamond film is above 16Wcm-1.K-1, which meets the high thermal conductivity requirement of the radiation-absorbing composite diamond film. A broad band Raman peak corresponding to a non-diamond carbon phase appeared in the range of 1500-1600 cm-1 and 1350 cm-1 for the black-absorbing radiation diamond film.With the increase of methane concentration, more non-diamond carbon would appear in the diamond film The phase composition, that is, graphite and other non-diamond carbon phases are enriched in the diamond film, the light transmittance of the composite diamond film is also getting worse.The black radiation-absorbing diamond layer is deposited directly on the high-purity diamond with high thermal conductivity and absorption Rate, and the back surface of the composite film has insulating properties.