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利用射频等离子体分解甲烷的技术在锗片上沉积了非晶结构的类金刚石碳膜。傅里叶红外光谱仪测量显示镀覆了类金刚石碳膜的锗片在红外范围内具有高增透作用 ,特别在 174 0～ 2 0 4 4cm-1其峰值透过率高达 99% ,在 94 5.7cm-1(10 .6 μm)处透过率为 94 .5%。利用实测的透过率曲线和改进的透过率公式 ,获得了该膜在 2 .5～ 12 μm的吸收系数 ,在 170 0～ 2 6 0 0 cm-1范围内的吸收系数接近于 0 ,在 10 .6 μm的吸收系数为 2 30 cm-1,膜主要由 sp3的 C- H键结构组成 ,各吸收峰均得到了很好的解释
An amorphous structure of diamond-like carbon film has been deposited on germanium sheet by using radio frequency plasma to decompose methane. The FTIR measurements showed that the germanium coated with diamond-like carbon film had high antireflection effect in the infrared range, especially at 174 0 ~ 2044cm-1 with a peak transmittance of 99% The transmittance at cm-1 (10 .6 μm) was 94.5%. The absorption coefficient of the film in the range of 2.5 ~ 12 μm was obtained by using the measured transmittance curves and the improved transmittance formula. The absorption coefficient of the film in the range of 170 0 ~ 26 0 0 cm-1 was close to 0, At 10.6 μm, the absorption coefficient is 2 30 cm -1. The membrane consists mainly of the C-H bond of sp 3 and the absorption peaks are well explained