将石英谐振器分别假设为正交各向异性体和各向同性体 ,利用有限元法对其进行失稳时临界力的计算和分析 ,得出了传感器结构稳定性与谐振器厚度及支撑条件的关系。在此基础上 ,对传感器结构进行了改进 ,并对单、双膜片结构传感器的各种性能进行了实验研究 ,得出如下结论 :传感器由单膜片结构改制成双膜片结构后 ,其非线性误差、滞后误差、重复性误差和蠕变误差普遍降低 ,滞后和重复性指标的提高尤为显著 ;另外 ,双膜片结构传感器的抗偏载及横向冲击能力大大增强 ,可靠性明显提高 The quartz resonators were assumed to be orthotropic and isotropic, respectively. The critical force of the quartz resonator was calculated and analyzed by using the finite element method. The stability of the sensor structure, the thickness of the resonator and the supporting conditions Relationship. On this basis, the sensor structure is improved, and the performance of the sensor with single and double diaphragm structure is studied experimentally, and the following conclusions are obtained: After the sensor is changed from a single diaphragm structure to a double diaphragm structure, Nonlinear error, hysteresis error, repeatability error and creep error are generally lower, and hysteresis and repeatability index are more notable. In addition, anti-eccentric load and lateral impact ability of double-diaphragm structure sensor are greatly enhanced, and reliability is obviously improved