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设计并制作了一种用于波长信道选择系统的新型柔性悬臂梁电磁驱动光开关,该光开关采用微光机电系统技术制作,由带有平面螺旋形线圈的聚酰亚胺悬臂梁、圆柱形永磁体、基座以及双面反射棱镜组成.通过改变线圈中激励电流的方向来控制开关动作.运用有限元的方法,模拟分析了线圈与永磁体之间电磁力的分布以及悬臂梁回复力、电磁力与挠度的关系.对该光开关的驱动性能进行了测试,实验结果表明:加载较小的工作电流(0.15A),悬臂梁便可以产生较大的挠度(0.925mm),满足波长信道选择系统光路偏转的要求.
A novel flexible cantilever electromagnetically driven optical switch for wavelength channel selection system is designed and fabricated. The optical switch is fabricated by the technology of micro-opto-electromechanical system and consists of a polyimide cantilever with a planar spiral coil, a cylindrical A permanent magnet, a base and a double-sided reflecting prism, the switching action is controlled by changing the direction of the exciting current in the coil, the distribution of the electromagnetic force between the coil and the permanent magnet and the restoring force of the cantilever beam are simulated and analyzed by the finite element method, The experimental results show that the cantilever beam can generate a large deflection (0.925mm) with a small operating current (0.15A), and the wavelength of the channel Select the system optical path deflection requirements.