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从理论上给出了具有存储特性的 MNOS电容在存储电荷后经受γ射线辐照的响应规律 ,并利用这一特性制作电子辐照吸收剂量计。采用 L PCVD工艺制作了具有存储特性的 MNOS电容 ,经自行研制对存储电荷干扰极小的 MNOS电容辐照实验测试系统 ,对样品进行了 60 Co辐照响应规律的研究。结果表明 :MNOS电容电子辐照剂量计适用于 10 3 ～ 10 5Gy范围内的累计剂量的测量。这种新型剂量计的优点是 :一次性校准可重复多次使用并可直接读数的电子测量方式 ,便于测量自动化 ,非常适用于太空飞行器和核技术应用中累计剂量的测量。
The response law of MNOS capacitors with storage characteristics after they are stored with charge is theoretically given, and the electron radiation absorptive dosimeter is made by using this feature. The MNOS capacitor with storage characteristics was fabricated by L PCVD process. The MNOS capacitive irradiation test system which has minimal interference with stored charge was developed and the 60 Co irradiation response was studied. The results show that the MNOS capacitive electron radiation dosimeter is suitable for the measurement of cumulative dose in the range of 103 to 105 Gy. The advantages of this new dosimeter are: One-time calibration Electronic measurements that can be repeated multiple times and directly read out for automated measurement, ideal for cumulative dose measurements in spacecraft and nuclear technology applications.