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光学读出式红外成像系统是近年来提出的一种新型红外成像技术,它是基于探测双材料微悬臂梁吸收红外辐射后的变形。本文采用了谱平面刀口滤波方法,将双材料(SiNx/Au)微梁阵列接收热像后的转角变形转化为像平面上微梁阵列的像所对应的光强变化,并设计制作了无基底单层膜结构微梁阵列(100×100pixels,微梁尺寸200×200μm2,厚2μm)。用该阵列在光学读出系统中,获得了室温下人体的热图像。该系统在室温时(300K)噪声等效温度差(NETD)达到0.2K。
Optical readout infrared imaging system is proposed in recent years, a new type of infrared imaging technology, which is based on the detection of bi-material micro-cantilever beams after absorbing infrared radiation deformation. In this paper, the spectral plane blade-edge filtering method is used to convert the angular deformation after receiving the thermal image of the dual-material (SiNx / Au) micro-beam array into the light intensity corresponding to the image of the micro-beam array on the image plane. Single layer micro-beam structure (100 × 100pixels, micro-beam size 200 × 200μm2, thickness 2μm). With this array in an optical read-out system, a thermal image of the human body at room temperature is obtained. The system achieves a net noise equivalent temperature difference (NETD) of 0.2K at room temperature (300K).