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利用表面微机械技术 ,成功制作了 1.3μm Si基 MOEMS可调谐光滤波器 .原型器件在 5 0 V的调谐电压下 ,调谐范围为 90 nm.该技术可以用于制作 1.3μm Si基可调谐光探测器 .
A 1.3μm Si-based MOEMS tunable optical filter was successfully fabricated using surface-micromachining technology.The prototype device has a tuning range of 90 nm at a tuning voltage of 50 V. This technique can be used to fabricate 1.3 μm Si-based tunable light Detector.