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用偶极子耦合系统来模拟近场干涉测量中的探针样品关系,并利用各电场分量之间的组合方程组精确计算出其可能探测到的强度和相位像。结果显示,近场干涉所测量到的近场像的分辨力和探测器的方位及参考光的偏振方向之间有较强的依赖关系,随着探测器位置不同或者参考光偏振方向的变化,同一样品在同一照明条件下所得到的图像也会发生明显的改变。在倏逝波照明的情况下,近场像的精确度随着探测器相对于样品视角的增大而改善,且在不同偏振方向的近场像中,只有偏振方向垂直于样品表面的像能真实反映样品的细节分布,且同时具有足够的强度分布。
The dipole coupling system is used to simulate the probe sample relationships in near-field interferometry and to accurately calculate the intensity and phase images that may be detected using the combination of equations between the electric field components. The results show that there is a strong dependence between the resolution of the near-field image measured by near-field interference and the orientation of the detector and the polarization direction of the reference light. With the different positions of the detectors or the change of the polarization direction of the reference light, The same sample in the same lighting conditions obtained images will also be significantly changed. In the case of evanescent wave illumination, the accuracy of near-field images improves with the detector’s viewing angle relative to the sample, and in near-field images of different polarization directions, only the polarization direction is perpendicular to the image energy of the sample surface Truly reflect the detail distribution of the sample, and at the same time have sufficient intensity distribution.