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在3.2mm厚的低铁玻璃衬底上采用金属Al靶在溅射气体Ar和反应气体N2的混合气体中,真空磁控反应溅射沉积半透明的Al-AlN金属陶瓷薄膜。再将沉积该薄膜的玻璃试样浸入沸腾的去离子水中,经一定时间氧化后,制备成表面粗糙的AlN和Al2O3的陶瓷混合物增透膜AlNxOy。在3.2 mm厚的低铁玻璃上,溅射沉积厚度为120 nm的Al-AlN金属陶瓷薄膜,沸水氧化8 min,制备的单面增透膜AlNxOy试样的太阳透射比Te达93.5%,可见光透射比Tv达95.2%。制备的双面增透膜AlNxOy试样的Te,Tv进一步提高,Te高达95.6%,与未镀膜玻璃衬底的90.4%相比,增加了5.2%;Tv高达97.0%,与玻璃衬底的91.6%相比,增加了5.4%。
A translucent Al-AlN cermet film was deposited by vacuum magnetron reactive sputtering on a 3.2 mm-thick low-iron glass substrate using a metal Al target in a mixed gas of a sputtering gas Ar and a reactive gas N2. Then, the glass sample deposited on the film was immersed in boiling deionized water and oxidized for a certain period of time to prepare an AlNxOy antireflection coating with a ceramic mixture of AlN and Al2O3 having a rough surface. Al-AlN cermets with a thickness of 120 nm were sputter-deposited on 3.2 mm-thick low-iron glass and oxidized by boiling water for 8 min. The solar transmittance of the prepared AlNxOy single-coated AlNxOy samples was 93.5% Transmission Tv 95.2%. The results show that the Te and Tv of the AlNxOy samples are further improved with Te as high as 95.6%, an increase of 5.2% compared with 90.4% of the uncoated glass substrate; the Tv is as high as 97.0% % Compared to an increase of 5.4%.