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为了满足不同材料的精细加工需求,采用三波长皮秒激光器作为光源,配合自行设计的光学系统和控制系统,研制了三波长同轴输出皮秒激光精细加工系统。该系统可使用任意一种、两种或三种激光波长进行同工作距加工,通过轴向色差补偿设计,实现轴向焦点补偿最大距离0.4mm,最小焦斑直径为3μm。初步探讨了该系统在微电子行业的应用,进行了铜电极板、手机屏的切割实验以及位置敏感阳极探测器图形的制作,实验证明该系统可满足多种材料的精细加工要求。
In order to meet the fine processing requirements of different materials, a three-wavelength picosecond laser is used as a light source, and a three-wavelength coaxial output picosecond laser fine processing system is developed in cooperation with a self-designed optical system and a control system. The system can use any one, two or three laser wavelength for working with the same distance, through axial color compensation design, the axial focus compensation maximum distance of 0.4mm, minimum focal spot diameter of 3μm. The application of the system in the microelectronics industry was discussed. The cutting experiment of copper electrode plate and mobile phone screen as well as the fabrication of the position sensitive anode detector were carried out. The experiment proves that the system can meet the fine processing requirements of many kinds of materials.