用双舟热蒸发制备了掺稀土硫化锌薄膜，用ｘ射线衍射技术对硫化锌粉末和所制薄膜的晶体相结构进行研究，发现硫化锌薄膜的晶体结构与硫化锌粉末的晶体结构不同。薄膜晶体的生长受诸多因素影响，有择优取向生长趋势，是二维层状结构沿ｃ轴方向的密堆积。这些研究为高新材料的研制提供了参考。 The rare earth doped zinc sulfide thin films were prepared by double boat thermal evaporation. The crystal structure of the zinc sulfide powders and the thin films was studied by x-ray diffraction. The crystal structure of zinc sulfide thin films was different from that of the zinc sulfide powders. The growth of thin-film crystal is influenced by many factors, and has the tendency of preferred orientation growth. It is a close packing of two-dimensional layered structure in the c-axis direction. These studies provide a reference for the development of high-tech materials.