大角度宽光谱红外成像系统灰度调节膜的研制

来源 :光学学报 | 被引量 : 0次 | 上传用户:wangeryan8
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随着现代光学测试技术的不断发展,对图像处理技术的要求越来越高。灰度级层次蕴含了图像细节的重要信息,因此改变图像灰度级可以使图像的细节更清晰。通过滤光技术可以形成不同的灰度级。依据光学薄膜理论,并结合膜系设计软件,通过建立膜系优化评价函数,实现了0°~60°入射3~5μm滤光膜的设计,并采用真空沉积技术研制了灰度调节膜。通过在钼舟上方放置铜网,解决了由于SiO沉积速率不稳定产生的膜层表面缺陷的问题;采用逆向分析法对实验测试结果进行模拟,通过调整膜层监控方式,使膜系的敏感层厚度得以精准控制,降低了膜厚控制误差,从而平滑了光谱曲线。经过测试,制备的灰度调节膜满足红外成像系统灰度级调节的要求,并通过了相关环境测试。 With the continuous development of modern optical test technology, the requirements of image processing technology are getting higher and higher. Grayscale level contains important details of the image information, so changing the image grayscale can make the details of the image more clearly. Through the filter technology can form different gray levels. According to the theory of optical thin film and the software of film design, the design of 3 ~ 5μm filter with 0 ° ~ 60 ° incidence was achieved through the establishment of the evaluation function of film system. The gray scale film was developed by vacuum deposition technology. By placing a copper mesh above the molybdenum boat, the problem of surface defects caused by the instability of the deposition rate of SiO is solved. The experimental results are simulated by the reverse analysis method. By adjusting the monitoring mode of the film layer, the sensitive layer The thickness is precisely controlled, reducing the control error of the film thickness, thus smoothing the spectral curve. After testing, the prepared grayscale film meets the requirements of grayscale adjustment of the infrared imaging system and has passed relevant environmental tests.
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