论文部分内容阅读
Ultrafine carbon particle and diamond like carbon film,compounded carbon with Ti, St, Sn, Ni, Pt etc., have superb characteristics in hardness, lubrication, heat conductivity, photo-transmissivity,semiconductivity etc. These materials were prepared with plasma technology from natural gas. The type of plasma, working atmosphere and operate conditions have been stUdied. The properties and applications of some typical ultrafine carbon particles and diamond like carbon films were also present.