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渡边文夫对极高真空(XHV)测量的系统而有成效的研究,受到国际同行的注目,其中最有实用价值和创新意义的是离子谱规,此规大大降低了X射线效应、电子激励解吸效应和热出气效应,可测量10-12Pa的XHV。本文试图较全面地评介渡边文夫的XHV测量研究工作,以资借鉴。
Watanabe WEN’s research on the system of very high vacuum (XHV) measurement has attracted worldwide attention. Among them, the most practical and innovative one is ion spectroscopy, which greatly reduces the X-ray effect. The electronic excitation Desorption effect and hot out gas effect, measurable XHV 10-12Pa. This article attempts to make a more comprehensive evaluation of Watanabe XHV measurement research work, in order to draw lessons from.