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研究一种基于电磁驱动微光机电系统(MOEMS)光开关阵列的串联集成波长选择开关结构,经过理论分析与计算,得出螺旋形线圈在相同电流密度下相比于八边形和四边形线圈能得到更大的电磁力;通过模态分析得到在设计的悬臂结构下,支撑臂响应时间约为22 ms。采用溅射、光刻、腐蚀和电铸等MOEMS工艺完成了光开关悬臂的制作,并通过制作对准标记及采用可见光与红外光相结合的装调方法,完成了1×8阵列的波长选择开关系统集成。经过测试得到,开关上升和下降的时间均约为20 ms,当电流为0.4 A时,支撑臂的挠度为1.28 mm,能达到系统光路转换的目的。该波长选择开关能够在2 V电压下,实现对8个不同波长信道的任意选择,其最大的插入损耗为1.741 dB,信道均匀性达到0.55 dB;插入损耗的测试结果与计算结果较吻合。
In this paper, a series of integrated wavelength selective switch structure based on MOEMS optical switch array is studied. Theoretical analysis and calculation show that the spiral coil has the same current density compared with octagon and quadrilateral coil Get more electromagnetic force; Through the modal analysis obtained in the design of the cantilever structure, the support arm response time is about 22 ms. The fabrication of the optical switch cantilever was completed by using MOEMS technology such as sputtering, lithography, etching and electroforming. The wavelength selection of 1 × 8 array was achieved through the fabrication of alignment marks and the adjustment method using visible light and infrared light Switch system integration. After testing, the rising and falling time of the switch is about 20 ms. When the current is 0.4 A, the deflection of the supporting arm is 1.28 mm, which can achieve the purpose of system optical path conversion. The wavelength selective switch can choose any of 8 different wavelength channels under the voltage of 2 V with a maximum insertion loss of 1.741 dB and a channel uniformity of 0.55 dB. The insertion loss test results are in good agreement with the calculated results.