现有成品率及关键面积估计模型中,假定缺陷轮廓为圆,而实际缺陷轮廓为非规则形状.本文提出了矩形缺陷轮廓的成品率模型,该模型与圆模型相比,考虑了缺陷的二维分布特性,接近真实缺陷形状及IC版图布线和成品率估计的特点.比较了新模型与真实缺陷及其圆模型引起的成品率损失,表明新模型在成品率估计方面更加精确,这对成品率精确估计与提高有重要意义. In the existing yield rate and critical area estimation model, the defect contour is assumed to be a circle, while the actual defect contour is an irregular shape.This paper presents a yield rate model of rectangular defect profile, which considers the defects of the second Dimensional distribution characteristics, near real defect shape and IC layout wiring and yield estimation.Comparing the new model with the real defect and the yield loss caused by the round model, it shows that the new model is more accurate in the yield estimation, Accurate rate estimation and improvement is of great significance.