微型数字式太阳敏感器光学系统由APS CMOS图像传感器和基于MEMS工艺的小孔阵列式光线引入器组成。图像传感器的分辨率为1024×1024pixel,像素尺寸为10μm×10μm;光线引入器具有微小孔阵列结构,小孔为方形孔,30×30阵列,尺寸为60μm×60μm,间距为250μm。光线引入器采用了MEMS工艺的掩模板制备工艺。针对所设计的光学系统计算了曝光时间,并在此基础上进行了地面成像实验。实验结果表明,光学系统设计合理,保证了敏感器所具有的高精度和大视场。 The miniature digital solar sensor optics consists of an APS CMOS image sensor and a MEMS-based aperture arrayed ray importer. The image sensor has a resolution of 1024 × 1024 pixels and a pixel size of 10 μm × 10 μm. The light introducing device has a micro hole array structure, and the small hole is a square hole, a 30 × 30 array with a size of 60 μm × 60 μm and a pitch of 250 μm. Light introduction device using the MEMS mask process mask preparation process. The exposure time was calculated for the designed optical system, and ground imaging experiments were carried out. The experimental results show that the optical system is designed reasonably to ensure the high precision and large field of view of the sensor.