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利用等离子体源离子注入(PSII)技术对冷作模具钢材料Cr12MoV 进行不同温度范围氮离子注入模拟和实验的研究,研究温度在离子注入中对材料表面改性的影响机理。首先,利用 Trim程序对氮离子在 Cr12MoV 中注入过程进行模拟计算。然后,在能量、剂量等参数相同条件下,改变脉冲频率,即相对应地改变样品的表面温度对不同样品进行试验对比,分别测试其表面温度为:250 ℃,312 ℃,365 ℃,412 ℃,471 ℃。并在 312 ℃的温度条件,分别做了不同剂量的试验。用 X射线衍射分析 ( XRD )表面结构、晶相变化;用俄歇电子能谱 (AES )分析注入氮的浓度分布;用维氏显微硬度计测定其显微硬度;用针-盘磨损机测试其耐磨性能。结果表明,计算机模拟注入深度比实际测定短,由此说明,升温离子注入比常规方法具有更深的注入层。通过对 Cr12MoV 材料 PSII 表面温度效应明显提高试样的表面显微硬度及耐磨性能,根据实验结果得出了该种材料的等离子体源离子注入的最佳工艺参数。
Plasma ion implantation (PSII) technique was used to simulate and experimentally study the Cr12MoV cold-working die steel with different temperature range and to study the effect of temperature on the surface modification of materials by ion implantation. First, the Trim program was used to simulate the implantation of nitrogen ions in Cr12MoV. Then, under the same conditions of energy, dose and other parameters, the pulse frequency was changed, that is, the surface temperature of the sample was changed correspondingly to test the different samples. The surface temperatures of the samples were respectively tested at 250 ℃, 312 ℃, 365 ℃ and 412 ℃ , 471 ° C. And at 312 ℃ temperature conditions, respectively, made different doses of the test. The surface structure and crystal phase change were analyzed by X-ray diffraction (XRD). The concentration distribution of nitrogen was analyzed by Auger electron spectroscopy (AES). The microhardness was measured by Vickers microhardness tester. Test its wear resistance. The results show that the computer simulation of injection depth is shorter than the actual measurement, which shows that the thermal ion implantation has a deeper injection layer than the conventional method. Through the surface temperature effect of PSII on Cr12MoV material, the surface microhardness and wear resistance of the sample are obviously improved. According to the experimental results, the optimum process parameters of plasma source ion implantation for the material are obtained.