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介绍一种简单而又实用的大尺寸测量系统。该系统包括两个组成部分——磁栅测尺及光准直定位装置,其测量精度优于2×10~(-5)。
Introduce a simple and practical large-size measurement system. The system includes two components - magnetic grating ruler and light collimation positioning device, the measurement accuracy is better than 2 × 10 ~ (-5).