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以光切法测量原理为基础,采用CCD摄像头和传统光切显微镜,使用VC开发工具和图像处理技术开发了一套材料表面粗糙度测量系统。根据光切显微镜下材料表面粗糙度图像有明显方向性的特征,使用旋滤波方法对图像进行预处理,并与传统的几种滤波方法进行了比较,同时讨论了滤波窗口的大小和切线方向采用的滤波方法对粗糙度测量结果的影响。该测量系统能够测量新国标中的全部参数,并能进行在线测量。介绍了系统的标定方法,对影响测量精度的主要误差因素进行了分析,并对算术平均偏差Ra为3.2μm的标准粗糙度比较样块进行了测量,测得的结果是:Ra约等于2.93μm,相对误差约为-8.5%,低于该系统的示值允许误差。
Based on the principle of light-cut measurement, a set of material surface roughness measurement system was developed by using CCD camera and conventional light-cutting microscope and VC development tools and image processing technology. According to the obvious directional characteristic of the material surface roughness under the light-cut microscope, the image was preprocessed by the spin-filtering method and compared with the traditional filtering methods. The size of the filtering window and the tangential direction were also discussed The influence of the filtering method on the roughness measurement results. The measurement system can measure all the parameters of the new national standard, and can make online measurements. The calibration method of the system is introduced and the main error factors affecting the measurement accuracy are analyzed. The standard roughness comparison sample with the arithmetic average deviation Ra of 3.2μm is measured. The measured results are as follows: Ra is about 2.93μm , The relative error is about -8.5%, lower than the allowable error of the system indication.