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本文提出了深缝衍射光通量损耗的一种近似计算方法 ,计算及实测表明 ,这种方法可作为测量深缝宽度的理论根据 ,测量下限为微米。
In this paper, an approximate calculation method for the deep-slot diffraction flux loss is proposed. The calculation and actual measurement show that this method can be used as a theoretical basis for measuring the deep-seam width, and the lower limit of measurement is micrometer.