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喷淋板通常用在化学气相沉积等真空腔室中,其流体动力学特性是决定真空腔室性能的关键因素之一。本文利用自主开发二维直接模拟Monte Carlo模拟程序对单个不同形状喷淋孔结构中性气体流场进行了数值仿真研究;讨论了七种不同单个喷淋孔结构的速度场、压力场和温度场分布情况。中性参考气体为氩气,固定入口压力200 Pa、温度300 K。结果表明,喷淋孔入口或出口形状影响腔室的工艺性能;而将喷淋孔入口和出口均设计成锥形,则腔室内流场分布较为理想。研究成果为喷淋板设计提供直接参考,同时对化工、热处理、光伏电池制造等领域中腔室部件的研发具有重要意义。
The shower plate is usually used in vacuum chambers such as chemical vapor deposition, and its hydrodynamic characteristics are one of the key factors that determine the performance of the vacuum chamber. In this paper, a two-dimensional direct simulation Monte Carlo simulation program is developed to simulate the flow field of neutral gas in a single spray hole with different shapes. The velocity field, pressure field and temperature field of seven different single spray hole structures Distribution. The neutral reference gas is argon, with a fixed inlet pressure of 200 Pa and a temperature of 300 K. The results show that the shape of the inlet or outlet of the spray hole affects the process performance of the chamber. When the inlet and the outlet of the spray hole are designed to be tapered, the flow field distribution in the chamber is ideal. The research results provide a direct reference for the design of shower plates and are of great significance for the research and development of chamber components in the fields of chemical engineering, heat treatment and photovoltaic cell manufacturing.