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目前商用原子力显微镜(AFM)大多使用的微悬臂式探针,力灵敏度可达到pN级别。然而受到工艺水平及检测方法限制,微悬臂谐振频率难以超过3.5 MHz,且Q值较低,制约了AFM的成像速度以及在液体中的成像效果。另外,光杠杆的检测方法无法与探针本身进行片上集成,较小的悬臂也给激光束的聚焦带来困难。基于以上考虑,本文提出两种基于MEMS谐振器的探针,振频率可达11 MHz,Q值为4 000,并集成了执行与传感功能以及批量加工纳米针尖的工艺。目前两种探针都已经实现对树脂图案的成像功能,力灵敏度最高可达5pN/√Hz。
At present, micro-cantilever probes mostly used in commercial atomic force microscopes (AFMs) can achieve force sensitivity of pN level. However, due to the limitation of process level and detection method, the resonant frequency of micro-cantilever is hard to exceed 3.5 MHz and the Q value is low, which restricts the imaging speed of AFM and the imaging effect in liquid. In addition, the optical lever detection method can not be integrated with the probe itself on-chip, the smaller cantilever laser beam also brings difficulties focusing. Based on the above considerations, this paper presents two MEMS resonator-based probes with a frequency of 11 MHz and a Q of 4 000, integrating the executive and sensing functions as well as the batch processing of nano-tips. At present, both probes have already realized the imaging function of the resin pattern, and the force sensitivity can reach up to 5pN / √Hz.