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采用独立的Ti靶和Al靶,用射频反应磁控溅射方法,逐步控制氧流量在高速钢(W18Cr4V)基体上沉积了一系列具有不同氧含量的TiAlNO薄膜。研究了氧流量对薄膜组织结构、硬度和摩擦性能的影响。结果表明,在(Ti,Al)N中加入氧形成由(Ti,Al)(N,O)纳米晶和(TiO2,Al2O3)非晶组成的复合结构。随着氧流量的增加,薄膜中晶体相晶格常数逐步减小,其取向则逐步从(111)为主转变为(111)和(200)混合。同时薄膜硬度缓慢地下降,摩擦系数和磨损量先减少后增大,在氧流量为0.9 sccm时达到最小值。研究同时表明,当氧流量为0.9 sccm时薄膜具有最小摩擦系数和高耐磨性,同时保持了高硬度,综合性能最好。
A series of TiAlNO films with different oxygen contents were deposited on the high speed steel (W18Cr4V) substrate by using RF reactive magnetron sputtering with independent Ti targets and Al targets. The effects of oxygen flow rate on the microstructure, hardness and tribological properties of the films were investigated. The results showed that oxygen was added to (Ti, Al) N to form a composite structure consisting of (Ti, Al) (N, O) nanocrystals and (TiO2, Al2O3) With the increase of oxygen flow rate, the lattice constant of the crystalline phase in the film decreases gradually, and the orientation gradually changes from (111) to (111) and (200). At the same time, the hardness of the film decreased slowly, the friction coefficient and the wear volume first decreased and then increased, reaching the minimum when the oxygen flow rate was 0.9 sccm. The study also showed that the film had the lowest coefficient of friction and wear resistance when the oxygen flow rate was 0.9 sccm, while maintaining high hardness, the best overall performance.