压电陶瓷管驱动三自由度微操作手的研究与应用

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基于机构、驱动、检测一体化的设计思想 ,研制出压电陶瓷管驱动的三自由度微操作手 ,研究了微操作手的建模、驱动与位置检测 ,给出了静力学建模公式 ,研制出双极性压电陶瓷驱动电源、微位移检测电路 ,并构成高精度位置闭环控制系统 ,实现了纳米级微动定位。最后以微操作手为核心构成微操作机器人系统 ,通过微操作手的微动调整 ,成功完成了直径为 0 .2 m m轴孔零件的微装配任务。 Based on the integrated design idea of ​​mechanism, drive and test, a three-DOF micromanipulator driven by piezoelectric ceramic tube was developed. The modeling, driving and position detection of micromanipulator were studied. The statics model, Developed a bipolar piezoelectric ceramic drive power, micro-displacement detection circuit, and constitute a high-precision closed-loop position control system to achieve nanoscale micro-positioning. Finally, a micromanipulation robot system is constructed with micromanipulator as the core. Through the micro-adjustment of the micromanipulator, the microassembly task of the shaft part with the diameter of0.2m m has been successfully completed.
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