为了提高氮等离子体浸没离子注入Ti 6Al 4V合金时氮原子的峰值深度 ,利用钇来增加氮在基体中的注入深度和扩散深度 ,先用 2 0kV的电压进行钇等离子体浸没离子注入处理 ,然后用 30kV的电压进行氮等离子体浸没离子注入处理。俄歇能谱测试表明氮原子的峰值深度有明显提高 ,注钇时间为 30min的试件 ,氮原子的峰值深度从 5 0nm上升到 10 0nm。摩擦性能测试表明处理后试件的抗磨损能力大大提高。 In order to increase the peak depth of nitrogen atoms in Ti 6Al 4V alloy by nitrogen plasma immersion ion implantation, the implantation depth and the diffusion depth of nitrogen in the matrix are increased by yttrium. Ion implantation with yttrium plasma is firstly performed with a voltage of 20 kV and then Nitrogen plasma immersion ion implantation was performed at a voltage of 30 kV. Auger spectroscopy test showed that the peak depth of nitrogen atoms increased obviously. When the yttrium time was 30 min, the peak depth of nitrogen increased from 50 nm to 100 nm. Friction performance tests show that the wear resistance of treated specimens is greatly improved.