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本文介绍了固态压阻压力传感器的敏感芯片、工艺制作、装配结构设计思想和主要技术性能,并对这类压力传感器的应用作了简要说明。
In this paper, the sensitive chips, manufacturing process, assembly structure design and the main technical performance of the solid state piezoresistive pressure sensor are introduced. The application of the pressure sensor is briefly described.