采用脉冲激光淀积技术，在（００１）取向的ＳｉＯ２衬底上制备了ＬｉＮｂＯ３薄膜。为了防止淀积过程缺氧，往淀积腔内充入１０～１５Ｐａ的流动氧气，淀积速度０．３～１．０ｎｍ／ｍｉｎ，淀积时间１ｈ，淀积结束后，充入０．６Ｐａ的氧气，在６５０℃保温０．５ｈ。采用ｘ射线衍射和扫描电镜对ＬｉＮｂＯ３薄膜的微观结构及表面形貌进行了检测。结果表明：ＬｉＮｂＯ３薄膜具有（０１２），（０２４）典型的ＬｉＮｂＯ３粉末晶体衍射峰，薄膜成分晶体结构比较纯净，而且薄膜表面光滑。利用棱镜耦合法将波长为０．６３８μｍ的激光束耦合到ＬｉＮｂＯ３薄膜中，观察到ＬｉＮｂＯ３薄膜具有较好的光波导性能，可望应用于非线性光学器件 LiNbO3 thin films were prepared on (001) oriented SiO2 substrates by pulsed laser deposition. In order to prevent the anoxic process of the deposition process, 10 to 15 Pa of flowing oxygen is filled into the deposition chamber, the deposition rate is 0.3 to 1.0 nm / min and the deposition time is 1 h. After the deposition is completed, 0.6 Pa Oxygen at 650 ° C for 0.5 h. The microstructure and surface morphology of LiNbO3 thin films were examined by X-ray diffraction and scanning electron microscopy. The results show that the LiNbO3 thin films have typical diffraction peaks of (012) and (024) LiNbO3 powders. The crystal structure of the films is relatively pure and the film surface is smooth. The prism coupling method was used to couple a laser beam with a wavelength of 0.638μm into the LiNbO3 thin film. The observed optical waveguide performance of the LiNbO3 thin film is expected to be applied to nonlinear optical devices