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散粒磨料研磨与固着磨料研磨是光学研磨加工过程中的两种主要手段,但两者材料去除的机制不同。目前针对高功率固体激光装置中的主要工作物质——磷酸盐激光钕玻璃的亚表面缺陷(SSD)研究相对较少,因此在实验的基础上,通过系统地研究固着磨料对磷酸盐激光钕玻璃的研磨工艺过程,分析了多种因素,如磨料粒径、载荷大小、机床转速,以及结合剂材料与冷却液等对钕玻璃亚表面缺陷形成的影响,并与散粒磨料研磨工艺所产生的亚表面缺陷进行了比较,对关键工艺参数进行定量,为高质量钕玻璃制造工艺的选型以及进一步优化亚表面缺陷提供了重要的参考数据。
Abrasive and fixed abrasive grinding are the two main methods in the optical grinding process, but the mechanism of material removal is different. At present, there are relatively few studies on sub-surface defects (SSD) of phosphate laser neodymium glass, which is the main working substance in high-power solid-state laser devices. Therefore, based on the experiments, Of the grinding process, analysis of a variety of factors, such as abrasive particle size, load size, machine speed, as well as the binder material and coolant on the formation of sub-surface defects of neodymium glass defects, and grinding abrasive abrasive produced Sub-surface defects were compared to quantify the key process parameters for the selection of high-quality neodymium glass manufacturing process and to further optimize the subsurface defects provide an important reference data.